Tribology in Nanomanufacturing

Nanomanufacturing is a new area brought up in recent years, which is defined by NSF as encompassing all processes aimed toward the building of nanoscale (in 1D, 2D, or 3D) structures, features, devices and systems suitable for integration across higher dimensional scales (micro-, meso- and macroscale) to provide functional products and useful services. Nanomanufacturing includes both bottom-up and top-down processes. Tribology becomes very important in nanomanufacturing, particularly in process of chemical mechanical material removal, contact printing, assembly and joining, scanning probe lithography, etc. The characteristics of liquid in a nano-gap, the collision, adsorption and desorption of nano-particles with solid surface surface modification, etc. are discussed.